Fire Safety Design in Semiconductor Manufacturing Cleanrooms

Paolo Bigatti

Paolo Bigatti, Fire Protection Engineer, 深入研究与集成半导体设施内的消防系统相关的挑战, 特别是在制造洁净室的受控环境中.

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As the demand for semiconductor manufacturing skyrockets, so does the need for cutting-edge, 符合规范的消防安全措施,为创新和可靠性设定了新的基准. 这对于半导体制造领域的洁净室环境尤其如此. 由于使用了可燃材料和可燃化学品, as well as the presence of high voltage electrical power, 洁净室中的任何一种火灾都可能很快变成灾难性的.

Challenges to Integrating Fire Protection

半导体设施建设的关键挑战之一是洁净室中工具连接的复杂过程. 制造工具和设施基础设施之间的连接需要严格遵守标准, particularly those outlined in SEMI S2, Environmental, Health & 管理连接操作的半导体制造设备安全指南. 而与工艺设备相关的风险是根据SEMI S2进行评估的, 获得和维护洁净室区域和生产设施的高度保护风险(HPR)资格,给这些操作增加了额外的复杂性.

半导体设施内的洁净室环境要求极高的精度和清洁度, 使传统消防安全措施的整合变得复杂. As a result, 标准的火灾探测系统可能不适合早期探测某些类型的火灾或半导体生产特定的化学反应.

半导体制造中涉及的独特化学过程和材料也引入了额外的复杂性. 一些半导体加工涉及到不能被水基抑制系统保护的材料. Because of this, 应聘请在储存和处理水反应性材料的危险区域的灭火剂和系统方面具有相关经验的专家来制定消防安全策略.

Designing for Safety in Semiconductor Facilities

In semiconductor facilities, 消防工程师通常负责设计和实施火灾报警, fire protection, smoke evacuation, fire compartmentation and interlocking systems. 该解决方案的核心是突破性的安全设计(DFS)方法, 一种旨在实现人身安全零事故率的范式转变. Key components of DFS include:

  • Evaluate Loss History. Learning from the past is crucial. 这种方法包括对当地和国际损失历史进行全面评估, providing a foundation for understanding potential risks.
  • Facility Drawing and Documentation Review. 对设施图纸和文件进行细致的检查,确保每个方面都符合最高的安全标准, leaving no room for oversight.
  • International Fabrication Facility Comparison. 从全球最佳实践中汲取灵感,包括将设计与国际制造设施进行比较, incorporating the latest advancements in safety protocols.
  • Semi-Quantitative Risk Matrix. 利用半定量风险矩阵识别潜在风险并对其进行排序, 允许有效的资源分配和安全增强的优先级.
  • New Innovation and Smart Technologies. DFS以创新为核心,整合尖端技术以加强安全措施, ensuring designs are not just compliant but forward-thinking.
  • Site Visits. 由多学科工程团队进行全面的现场考察,确保理论设计无缝地转化为实际的安全实施. Benefits to the client include safety as a cornerstone.

Go Beyond Compliance with Your Fire Safety Strategy

Jensen Hughes对DFS的承诺并不仅仅停留在合规上. 彩宝网平台的消防工程顾问利用他们在消防安全系统方面的专业知识和经验, 抑制剂和有害物质的储存设计成本效益高, 基于性能的保护系统,不仅符合规范要求,而且维护生命安全的最高标准. 彩宝网平台的团队经常处理涉及生命安全的具有挑战性的设计, mission continuity, property protection, heritage preservation and environmental protection. Find out more about our team here.

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About the author

Paolo Bigatti
Paolo is a Senior Fire Consultant with 12 years of experience. Paolo专门从事消防系统的设计、审查和规范.

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